Student Manual

Ellipsometery is used to determine the thickness and dielectric properties (optical constants) of thin films by analyzing the polarization changes that take place in light upon reflection off these films. In this experiment, different combinations of substrates and thin films will be analyzed to determine the thicknesses and optical constants of the films using the ellipsometer.

Hardware ManualEllipsometry Manual
Experiment Code2.16

Further Readings and References

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Pictorial Procedure