Make and ManufacturerVTS, South Korea
Related ManualsUser guide for the magnetron sputterer can be seen here.
Contact PersonDr. Murtaza Saleem, Dr. Sabieh Anwar, Ali Akbar

Magnetron’s sputtering machine from VTS Korea offers the possibility of three targets enabling co-deposition onto a heated and spun substrate using DC and rf excitation. This is a versatile high vacuum system that boosts the potential of the Physlab and spin physics group of synthesizing thin film and multilayered structures for spintronics, electronic and magnetic devices. The device is also fitted with an in-situ crystal thickness monitor that was installed in 2016.

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thickness monitor2